Thermco Maxibrute furnace,
Vacuum anneal LPCVD configuration
Upgraded to 200mm operation in 2012
Upgraded to Semy Mypro control system
Integrated gas system and integrated LPCVD cantilever loader assembly with paddle
400 to 800 degree operation, as configured
Located in North America
Sealed and skidded as removed from the cleanroom (not crated)
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